This study addresses the improvement of hardness and scratch resistance provided by TiN/TiCN/TiC multilayer thin films on Ti6Al4V and Silicon (Si) substrates using magnetron sputtering. X-ray diffraction (XRD), scanning electron microscopy (SEM), and nanoindentation and scratch tests have been carried out in order to characterize the film layer in terms of structural, chemical, and mechanical properties. The cubic and polycrystalline structure of TiN/TiCN/TiC films were confirmed by the XRD analysis. SEM cross-sectional images revealed that the coating has dense and columnar structure with a thickness of 3.065 μm and had formed a good adhesion to the substrate. Hardness and critical load values of the coated Ti6Al4V substrate, as obtained from the scratch and nanoindentation test, were 19.96 GPa and 26 N, respectively.
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