Microstructure and Mechanical Properties of TiN/TiCN/TiC Multilayer Thin Films Deposited by Magnetron Sputtering. INJIRR [Internet]. 2021 Jul. 15 [cited 2024 May 16];5(1):15-20. Available from: http://www.injirr.com/index.php/injirr/article/view/67