Microstructure and Mechanical Properties of TiN/TiCN/TiC Multilayer Thin Films Deposited by Magnetron Sputtering. International Journal of Innovative Research and Reviews, [S. l.], v. 5, n. 1, p. 15–20, 2021. Disponível em: http://www.injirr.com/index.php/injirr/article/view/67.. Acesso em: 16 may. 2024.